Invention Grant
- Patent Title: Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber
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Application No.: US17272582Application Date: 2018-09-19
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Publication No.: US11377310B2Publication Date: 2022-07-05
- Inventor: Henning Aust , Thorsten Meiss
- Applicant: Applied Materials, Inc. , Henning Aust , Thorsten Meiss
- Applicant Address: US CA Santa Clara; DE Mühltal; DE Darmstadt
- Assignee: Applied Materials, Inc.,Henning Aust,Thorsten Meiss
- Current Assignee: Applied Materials, Inc.,Henning Aust,Thorsten Meiss
- Current Assignee Address: US CA Santa Clara; DE Mühltal; DE Darmstadt
- Agency: Patterson & Sheridan, LLP
- International Application: PCT/EP2018/075375 WO 20180919
- International Announcement: WO2020/057739 WO 20200326
- Main IPC: B65G54/02
- IPC: B65G54/02 ; B65G39/08 ; H01L21/677 ; B65G49/06

Abstract:
A magnetic levitation system for contactlessly holding and moving a carrier in a vacuum chamber, including a base defining a transportation track, a carrier movable above the base along the transportation track, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. The at least one magnetic bearing includes a first magnet unit arranged at the base and a second magnet unit arranged at the carrier. The magnetic levitation system further includes a magnetic side stabilization device for stabilizing the carrier in a lateral direction, the magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, wherein at least one of the first magnet unit and the first stabilization magnet unit is arranged in a housing space of the base, the housing space being separated from an inner volume of the vacuum chamber by a separation wall.
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