Invention Grant
- Patent Title: Method for producing microstructures in a glass substrate
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Application No.: US17608996Application Date: 2020-04-23
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Publication No.: US11377387B1Publication Date: 2022-07-05
- Inventor: Roman Ostholt , Norbert Ambrosius
- Applicant: LPKF Laser & Electronics AG , Roman Ostholt , Norbert Ambrosius
- Applicant Address: DE Garbsen; DE Langenhagen; DE Garbsen
- Assignee: LPKF Laser & Electronics AG,Roman Ostholt,Norbert Ambrosius
- Current Assignee: LPKF Laser & Electronics AG,Roman Ostholt,Norbert Ambrosius
- Current Assignee Address: DE Garbsen; DE Langenhagen; DE Garbsen
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102019111634.1 20190506
- International Application: PCT/DE2020/100333 WO 20200423
- International Announcement: WO2020/224706 WO 20201112
- Main IPC: C03C15/00
- IPC: C03C15/00 ; C03C23/00 ; B23K26/364 ; B23K103/00 ; B81C1/00

Abstract:
A method for producing microstructures includes introducing modifications by a laser beam into a volume between two opposite outer surfaces of a glass substrate. An etching method is carried out which provides anisotropic material removal in one of the outer surfaces so as to produce recesses that have a conical shape. A layer that is resistant to an etching effect of the etching method is applied as a cover layer to only one outer surface. Then, a further etching method is carried out so that material is removed in the other outer surface until recesses of this other outer surface, which are produced and/or enlarged by the further etching method, have reached the cover layer.
Public/Granted literature
- US20220204394A1 METHOD FOR PRODUCING MICROSTRUCTURES IN A GLASS SUBSTRATE Public/Granted day:2022-06-30
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