Invention Grant
- Patent Title: Composition for surface treatment, method for producing the same, and surface treatment method using the same
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Application No.: US16492338Application Date: 2018-01-23
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Publication No.: US11377627B2Publication Date: 2022-07-05
- Inventor: Yukinobu Yoshizaki , Koichi Sakabe , Satoru Yarita , Kenichi Komoto
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JPJP2017-048630 20170314
- International Application: PCT/JP2018/001953 WO 20180123
- International Announcement: WO2018/168207 WO 20180920
- Main IPC: C11D7/34
- IPC: C11D7/34 ; C11D11/00 ; C11D7/10 ; C11D7/20 ; C11D7/26 ; C11D7/32 ; C11D7/36 ; H01L21/02 ; B08B1/00 ; B08B3/02 ; B08B3/08

Abstract:
The present invention provides a means by which it is possible to sufficiently suppress an organic residue while favorably decreasing a ceria residue on a polished object to be polished obtained after being polished using a polishing composition containing ceria.
The present invention relates to a composition for surface treatment, which is for a surface treatment of a polished object to be polished obtained after being polished using a polishing composition containing ceria, contains a carboxy group-containing (co)polymer having a structural unit derived from a monomer having a carboxy group or a salt group of the carboxy group, a SOx or NOy partial structure-containing compound having a partial structure represented by SOx or NOy (where x and y each independently denote a real number 1 to 5), and a dispersing medium, and has a pH of 1 or more and 8 or less.
The present invention relates to a composition for surface treatment, which is for a surface treatment of a polished object to be polished obtained after being polished using a polishing composition containing ceria, contains a carboxy group-containing (co)polymer having a structural unit derived from a monomer having a carboxy group or a salt group of the carboxy group, a SOx or NOy partial structure-containing compound having a partial structure represented by SOx or NOy (where x and y each independently denote a real number 1 to 5), and a dispersing medium, and has a pH of 1 or more and 8 or less.
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