Invention Grant
- Patent Title: Oxide sintered body and transparent conductive oxide film
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Application No.: US17031294Application Date: 2020-09-24
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Publication No.: US11377725B2Publication Date: 2022-07-05
- Inventor: Ryo Akiike , Yuya Tsuchida , Hideto Kuramochi
- Applicant: TOSOH CORPORATION
- Applicant Address: JP Shunan
- Assignee: TOSOH CORPORATION
- Current Assignee: TOSOH CORPORATION
- Current Assignee Address: JP Shunan
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: C04B35/01
- IPC: C04B35/01 ; C04B35/495 ; H01B1/08 ; C23C14/34 ; C03C17/245 ; C04B35/626 ; H01L31/18 ; H01B1/00 ; C04B35/64 ; H01L27/30 ; H01L31/0224 ; H01L31/0264 ; C23C14/08 ; C23C14/35 ; H01B13/00 ; H01J37/34
Abstract:
An oxide sintered body containing indium, hafnium, tantalum, and oxygen as constituent elements, in which when indium, hafnium, and tantalum are designated as In, Hf, and Ta, respectively, the atomic ratio of Hf/(In+Hf+Ta) is equal to 0.002 to 0.030, and the atomic ratio of Ta/(In+Hf+Ta) is equal to 0.0002 to 0.013.
Public/Granted literature
- US20210002755A1 OXIDE SINTERED BODY AND TRANSPARENT CONDUCTIVE OXIDE FILM Public/Granted day:2021-01-07
Information query
