Invention Grant
- Patent Title: Mono-crystalline silicon growth method
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Application No.: US16727941Application Date: 2019-12-27
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Publication No.: US11377752B2Publication Date: 2022-07-05
- Inventor: Chun-Hung Chen , Hsing-Pang Wang , Wen-Ching Hsu , I-Ching Li
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GlobalWafers Co., Ltd.
- Current Assignee: GlobalWafers Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Li & Cai Intellectual Property Office
- Priority: TW107147827 20181228
- Main IPC: C30B15/14
- IPC: C30B15/14 ; C30B15/00 ; C30B15/20 ; C30B29/06

Abstract:
A mono-crystalline silicon growth method includes: providing a furnace, a supporting base and a crucible which do not rotate relative to the furnace, and a heating module disposed at an outer periphery of the supporting base. After solidifying a liquid surface of a silicon melt in the crucible to form a crystal, the heating power of the heating module is successively reduced to appropriately adjust the temperature around the crucible to effectively control a temperature gradient of a thermal field around the crucible, so as to form a mono-crystalline silicon ingot by solidifying the silicon melt.
Public/Granted literature
- US20200208296A1 MONO-CRYSTALLINE SILICON GROWTH METHOD Public/Granted day:2020-07-02
Information query
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