Clean room and method for regulating airflow of clean room
Abstract:
A clean room and a method for regulating an airflow of the clean room. The clean room includes: a plurality of process spaces in communication with one another, and a fan filter unit. The fan filter units is installed at a top of each one of the plurality of process spaces, and a bottom of each of the plurality of process spaces is provided with a ventilation passage. The clean room further includes: an airflow regulation device, configured to regulate an airflow in each of the process spaces; the airflow regulation device is installed inside each of the plurality of process spaces, and is arranged downstream of the respective fan filter unit.
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