Invention Grant
- Patent Title: Sensor element for measuring pressure and temperature
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Application No.: US16982563Application Date: 2019-03-19
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Publication No.: US11378478B2Publication Date: 2022-07-05
- Inventor: Johnsen Tanjaya , Wolfgang Schreiber-Prillwitz
- Applicant: TDK Electronics AG
- Applicant Address: DE Munich
- Assignee: TDK Electronics AG
- Current Assignee: TDK Electronics AG
- Current Assignee Address: DE Munich
- Agency: Slater Matsil, LLP
- Priority: DE102018106518.3 20180320
- International Application: PCT/EP2019/056837 WO 20190319
- International Announcement: WO2019/180018 WO 20190926
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L19/00 ; G01K7/16

Abstract:
A sensor element is disclosed. In an embodiment, a sensor element with an increased level of integration includes a main part with a membrane and an edge zone arranged around the membrane and an electrically conductive layer having a first region arranged over the membrane of the main part and a second region arranged over the edge zone of the main part, wherein the membrane is a pressure-sensitive zone of the main part such that the membrane is configured to undergo deformation as a function of a pressure differential between an upper side and an underside of the membrane, wherein the edge zone is a pressure-insensitive zone, and wherein the electrically conductive layer is structured in the second region such that at least one temperature-dependent resistance is formed in the second region of the electrically conductive layer.
Public/Granted literature
- US20210025776A1 Sensor Element for Measuring Pressure and Temperature Public/Granted day:2021-01-28
Information query