Fabrication of iridium oxide pH sensors and sensory arrays
Abstract:
A method of fabricating amorphous iridium oxide film pH sensors and microfluidic devices incorporating the pH sensors. The present invention provides a fabrication method for sol-gel based iridium oxide (IrOx) thin film pH sensors and microelectrodes. The invention further provides microelectrode arrays produced by the fabrication methods and microfluidic devices including the microelectrodes and microelectrode arrays. In one aspect, the invention is a method for fabricating a microelectrode pH sensor.
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