Invention Grant
- Patent Title: Thermal test head for an integrated circuit device
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Application No.: US17023014Application Date: 2020-09-16
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Publication No.: US11378615B2Publication Date: 2022-07-05
- Inventor: See Jean Chan , Zhaomeng Wang , Yao Kun Leonard Mak , MuralliKrishna Govindandhanasekaran
- Applicant: AEM SINGAPORE PTE LTD
- Applicant Address: SG Singapore
- Assignee: AEM SINGAPORE PTE LTD
- Current Assignee: AEM SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: SG10202003589W 20200420,SG10202007954R 20200819
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/04 ; G01R1/067 ; H01L35/30

Abstract:
A thermal test head for an integrated circuit device includes a heat exchanger assembly, a contact assembly configured to contact the integrated circuit, and a thermal control assembly disposed between the heat exchanger assembly and the contact assembly. The thermal control assembly includes a Peltier device in thermal contact with opposing surfaces of the heat exchanger assembly and the contact assembly, and a spacer in physical contact with the opposing surfaces of the heat exchanger assembly and the contact assembly.
Public/Granted literature
- US20210325452A1 THERMAL TEST HEAD FOR AN INTEGRATED CIRCUIT DEVICE Public/Granted day:2021-10-21
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