Invention Grant
- Patent Title: Memory arrays with vertical thin film transistors coupled between digit lines
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Application No.: US17140540Application Date: 2021-01-04
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Publication No.: US11380388B2Publication Date: 2022-07-05
- Inventor: Scott J. Derner , Charles L. Ingalls
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: G11C11/24
- IPC: G11C11/24 ; G11C11/4097 ; H01L27/108 ; G11C11/4091 ; H01L27/12 ; H01L29/786 ; H01L27/11507 ; H01L27/11509

Abstract:
In the examples disclosed herein, a memory array can have a first group of memory cells coupled to a first digit line at a first level and a second group of memory cells coupled to a second digit line at the first level. A third digit line can be at a second level and can be coupled to a main sense amplifier. A first vertical thin film transistor (TFT) can be at a third level between the first and second levels can be coupled between the first digit line and the third digit line. A second vertical TFT can be at the third level and can be coupled between the second digit line and the third digit line. A local sense amplifier can be coupled to the first and second digit lines.
Public/Granted literature
- US20210125661A1 MEMORY ARRAYS WITH VERTICAL THIN FILM TRANSISTORS COUPLED BETWEEN DIGIT LINES Public/Granted day:2021-04-29
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