Invention Grant
- Patent Title: Carrier device, work processing apparatus, control method of carrier device and storage medium storing program
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Application No.: US16842974Application Date: 2020-04-08
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Publication No.: US11380559B2Publication Date: 2022-07-05
- Inventor: Yohei Eto , Junji Kunisawa , Teruaki Hombo , Keiji Kanazawa
- Applicant: EBARA CORPORATION , HIRATA CORPORATION
- Applicant Address: JP Tokyo; JP Kumamoto
- Assignee: EBARA CORPORATION,HIRATA CORPORATION
- Current Assignee: EBARA CORPORATION,HIRATA CORPORATION
- Current Assignee Address: JP Tokyo; JP Kumamoto
- Agency: Pearne & Gordon LLP
- Priority: JPJP2019-074397 20190409
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/687

Abstract:
An object is to suppress dew condensation in a carrier device. There is provided a carrier device comprising a body; a rotational part provided to be rotatable relative to the body; an arm supported on the rotational part; an end effector provided in a leading end portion of the arm and configured to hold a work; a gas supply unit configured to supply a gas to an arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm; and an exhaust unit provided in a body-side internal space that communicates with the arm-side internal space and configured to discharge the gas in the arm-side internal space and/or in the body-side internal space.
Public/Granted literature
Information query
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