Invention Grant
- Patent Title: Methods for forming three-dimensional memory devices with supporting structure for staircase region
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Application No.: US17085406Application Date: 2020-10-30
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Publication No.: US11380629B2Publication Date: 2022-07-05
- Inventor: Kun Zhang , Linchun Wu , Zhong Zhang , Wenxi Zhou , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/00 ; H01L25/18 ; H01L25/00 ; H01L27/11556 ; H01L27/11582

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A peripheral circuit is formed on a first substrate. A first semiconductor layer is formed on a second substrate. A supporting structure and a second semiconductor layer coplanar with the supporting structure are formed on the first semiconductor layer. A memory stack is formed above the supporting structure and the second semiconductor layer. The memory stack has a staircase region overlapping the supporting structure. A channel structure extending vertically through the memory stack and the second semiconductor layer into the first semiconductor layer is formed. The first substrate and the second substrate are bonded in a face-to-face manner.
Public/Granted literature
- US20220037267A1 METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICES WITH SUPPORTING STRUCTURE FOR STAIRCASE REGION Public/Granted day:2022-02-03
Information query
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