Invention Grant
- Patent Title: Copper pillar bump having annular protrusion
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Application No.: US17090082Application Date: 2020-11-05
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Publication No.: US11380642B2Publication Date: 2022-07-05
- Inventor: Kengo Yamamoto , Daisuke Ito , Mitsuaki Okubo , Kenji Uchida
- Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Applicant Address: JP Nagano
- Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee Address: JP Nagano
- Agency: IPUSA, PLLC
- Priority: JPJP2019-220606 20191205
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/488 ; H01L23/532

Abstract:
A copper pillar bump for an electrode pad of a semiconductor chip includes a first copper layer, a first metal layer formed directly on the first copper layer, a second copper layer formed directly on the first metal layer, and a second metal layer formed directly on the second copper layer, wherein the first metal layer and the second metal layer are made of a metal having a different etching rate than copper, wherein an outer perimeter ring of the first metal layer protrudes beyond a lateral surface of the first copper layer, and wherein an outer perimeter ring of the second metal layer protrudes beyond a lateral surface of the second copper layer.
Public/Granted literature
- US20210175193A1 COPPER PILLAR BUMP HAVING ANNULAR PROTRUSION Public/Granted day:2021-06-10
Information query
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