Invention Grant
- Patent Title: Capacitor, semiconductor device, and manufacturing method of semiconductor device
-
Application No.: US16478532Application Date: 2018-01-18
-
Publication No.: US11380688B2Publication Date: 2022-07-05
- Inventor: Yuichi Sato , Ryota Hodo , Yuta Iida , Tomoaki Moriwaka
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi
- Agency: Fish & Richardson P.C.
- Priority: JPJP2017-013142 20170127
- International Application: PCT/IB2018/050297 WO 20180118
- International Announcement: WO2018/138604 WO 20180802
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/02 ; H01L21/311 ; H01L21/321 ; H01L23/532

Abstract:
A semiconductor device that can be miniaturized or highly integrated is provided. The semiconductor device includes a transistor and a capacitor. The transistor includes a metal oxide and a first conductor that is electrically connected to the metal oxide. The capacitor includes a first insulator which is provided over the metal oxide and which the first conductor penetrates; a second insulator provided over the first insulator and including an opening reaching the first insulator and the first conductor; a second conductor in contact with an inner wall of the opening, the first insulator, and the first conductor; a third insulator provided over the second conductor; and a fourth conductor provided over the third insulator. The first insulator has higher capability of inhibiting the passage of hydrogen than the second insulator.
Public/Granted literature
- US20200043931A1 CAPACITOR, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE Public/Granted day:2020-02-06
Information query
IPC分类: