Invention Grant
- Patent Title: Group III-nitride based vertical power device and system
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Application No.: US16750711Application Date: 2020-01-23
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Publication No.: US11380789B2Publication Date: 2022-07-05
- Inventor: Steve Stoffels , Stefaan Decoutere
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP19153573 20190124
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/778 ; H01L21/8252 ; H01L29/20
Abstract:
A vertical power device is disclosed, the device having a top side and a bottom side, and the device comprising (i) a substrate; (ii) a layered group III-Nitride based device stack formed atop the substrate; (iii) a first vertical group III-Nitride based device and a second vertical group III-Nitride based device formed in the group III-Nitride based device stack, wherein the first vertical group III-Nitride based device and the second vertical group III-Nitride based device are electrically connected; and (iv) a first vertical device isolation structure that isolates the first vertical group III-Nitride based device from the second vertical group III-Nitride based device. Also disclosed are a vertical power system integrating vertical power devices and a process for fabricating a vertical power device.
Public/Granted literature
- US20200243678A1 Group III-Nitride Based Vertical Power Device and System Public/Granted day:2020-07-30
Information query
IPC分类:
