Invention Grant
- Patent Title: Magnetic memory devices with layered electrodes and methods of fabrication
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Application No.: US16024522Application Date: 2018-06-29
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Publication No.: US11380838B2Publication Date: 2022-07-05
- Inventor: Justin Brockman , Conor Puls , Stephen Wu , Christopher Wiegand , Tofizur Rahman , Daniel Ouellette , Angeline Smith , Andrew Smith , Pedro Quintero , Juan Alzate-Vinasco , Oleg Golonzka
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L43/02
- IPC: H01L43/02 ; G11C11/16 ; H01L21/768 ; H01L23/528 ; H01L27/22 ; H01L43/08 ; H01L43/10 ; H01L43/12

Abstract:
A memory device method of fabrication that includes a first electrode having a first conductive layer including titanium and nitrogen and a second conductive layer on the first conductive layer that includes tantalum and nitrogen. The memory device further includes a magnetic tunnel junction (MTJ) on the first electrode. In some embodiments, at least a portion of the first conductive layer proximal to an interface with the second conductive layer includes oxygen.
Public/Granted literature
- US20200006634A1 MAGNETIC MEMORY DEVICES WITH LAYERED ELECTRODES AND METHODS OF FABRICATION Public/Granted day:2020-01-02
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