Invention Grant
- Patent Title: Stage driving apparatus, lithography apparatus, and method of manufacturing article
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Application No.: US16353235Application Date: 2019-03-14
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Publication No.: US11381196B2Publication Date: 2022-07-05
- Inventor: Takayasu Matsui
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2018-049909 20180316
- Main IPC: H02P29/62
- IPC: H02P29/62 ; H01L21/027 ; H01L21/67 ; H01L21/68 ; H02P25/064 ; G03F7/00 ; G03F7/20 ; H02K15/12 ; H02K41/03 ; H02K11/25

Abstract:
The present invention provides a stage driving apparatus for driving a stage, comprising: a linear motor including a stator which includes a coil array obtained by alternately arraying first phase coils and second phase coils, and a movable element placed on the stage; and a control unit configured to control the linear motor by controlling an energization state of the coil array, wherein in a stopping period during which the stage is stopped in a predetermined position, the control unit holds a position of the stage in the predetermined position by turning on the first phase coil among the coil array, and generates heat by turning on the second phase coil arranged in a position where no thrust is given to the movable element among the coil array.
Public/Granted literature
- US20190288633A1 STAGE DRIVING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2019-09-19
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