Invention Grant
- Patent Title: Vibrator device, vibrator module, and electronic apparatus
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Application No.: US16774776Application Date: 2020-01-28
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Publication No.: US11381219B2Publication Date: 2022-07-05
- Inventor: Junichi Takeuchi
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JPJP2019-016277 20190131
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/10 ; H03H9/19 ; H03H9/05

Abstract:
A vibrator device includes a base, a vibrator element attached to the base, and a lid housing the vibrator element between the base and itself and bonded to the base. The base has a semiconductor substrate including a first surface bonded to the lid and a second surface in a front-back relationship with the first surface, a first insulating layer placed on the first surface, first, second internal terminals placed on the first insulating layer and electrically coupled to the vibrator element, a second insulating layer placed on the second surface, and first, second external terminals placed on the second insulating layer and electrically coupled to the first, second internal terminals. The second insulating layer has a first external terminal region in which the first external terminal is placed and a second external terminal region separated from the first external terminal region, in which the second external terminal is placed.
Public/Granted literature
- US20200252043A1 VIBRATOR DEVICE, VIBRATOR MODULE, AND ELECTRONIC APPARATUS Public/Granted day:2020-08-06
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