Invention Grant
- Patent Title: Ceramic material and electrostatic chuck device
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Application No.: US16072750Application Date: 2017-01-27
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Publication No.: US11387132B2Publication Date: 2022-07-12
- Inventor: Yoshiki Yoshioka , Nobuhiro Hidaka , Hironori Kugimoto
- Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Merchant & Gould P.C.
- Priority: JP2016-013843 20160127,JPJP2016-065345 20160329
- International Application: PCT/JP2017/002934 WO 20170127
- International Announcement: WO2017/131159 WO 20170803
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C04B35/117 ; C04B35/626 ; C04B35/645 ; H01J37/32 ; B25J19/00 ; B25J15/00 ; H01L21/687 ; B25J9/00 ; B25J11/00
Abstract:
Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
Public/Granted literature
- US20190043746A1 CERAMIC MATERIAL AND ELECTROSTATIC CHUCK DEVICE Public/Granted day:2019-02-07
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