Invention Grant
- Patent Title: Semiconductor device
-
Application No.: US16872395Application Date: 2020-05-12
-
Publication No.: US11387148B2Publication Date: 2022-07-12
- Inventor: Li-Wei Feng , Shih-Hung Tsai , Chao-Hung Lin , Hon-Huei Liu , Shih-Fang Hong , Jyh-Shyang Jenq
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201510062339.9 20150206
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/225 ; H01L21/324 ; H01L27/092 ; H01L29/66 ; H01L29/78

Abstract:
A semiconductor device includes: a substrate having a first region and a second region; a first fin-shaped structure on the first region and a second fin-shaped structure on the second region, wherein each of the first fin-shaped structure and the second fin-shaped structure comprises a top portion and a bottom portion; a first doped layer around the bottom portion of the first fin-shaped structure; a second doped layer around the bottom portion of the second fin-shaped structure; a first liner on the first doped layer; and a second liner on the second doped layer.
Public/Granted literature
- US20200273758A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-08-27
Information query
IPC分类: