Invention Grant
- Patent Title: Amorphous silicon thin film transistor and method for manufacturing the same
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Application No.: US16496441Application Date: 2019-04-22
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Publication No.: US11387370B2Publication Date: 2022-07-12
- Inventor: Jiaxin Li
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen
- Agency: Nathan & Associates
- Agent Menachem Nathan
- Priority: CN201910283998.3 20190410
- International Application: PCT/CN2019/083675 WO 20190422
- International Announcement: WO2020/206723 WO 20201015
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/02 ; H01L27/12 ; H01L29/66

Abstract:
The present invention provides an amorphous silicon thin film transistor and a manufacturing method of the amorphous silicon thin film transistor, which comprise: a substrate, a gate electrode layer, a gate insulating layer, an active layer, a source/drain electrode layer, an N+-doped layer, a protective insulating layer, and a passivation layer. The N+-doped layer is disposed between the active layer and the source/drain electrode layer. The protective insulating layer is disposed on the source/drain electrode layer. A channel is formed in the source/drain electrode layer and penetrates the N+-doped layer and the protective insulating layer. The passivation layer covers the channel and the protective insulating layer. The protective insulating layer and the source/drain electrode layer are flush with each other in the channel.
Information query
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