Invention Grant
- Patent Title: Controlling the uniformity of PECVD deposition
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Application No.: US16521207Application Date: 2019-07-24
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Publication No.: US11406765B2Publication Date: 2022-08-09
- Inventor: Christopher Weikart , Becky L. Clark , Adam Stevenson , Robert S. Abrams , John Belfance
- Applicant: SIO2 MEDICAL PRODUCTS, INC.
- Applicant Address: US AL Auburn
- Assignee: SIO2 MEDICAL PRODUCTS, INC.
- Current Assignee: SIO2 MEDICAL PRODUCTS, INC.
- Current Assignee Address: US AL Auburn
- Agency: SI02 Medical Products, Inc.
- Main IPC: A61M5/31
- IPC: A61M5/31 ; C23C16/04 ; C23C16/40 ; C23C16/50

Abstract:
A method and apparatus for plasma modifying a workpiece such as a syringe barrel, cartridge barrel, vial, or blood tube is described. Plasma is provided within the lumen of the workpiece. The plasma is provided under conditions effective for plasma modification of a surface of the workpiece. A magnetic field is provided in at least a portion of the lumen. The magnetic field has an orientation and field strength effective to improve the uniformity of plasma modification of the interior surface of the generally cylindrical wall. A vessel made according to the process or using the apparatus described above. A pharmaceutical package comprising the syringe barrel or vial containing a pharmaceutical preparation, secured with a closure.
Information query
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