Invention Grant
- Patent Title: Vacuum pump, rotor, rotor fin, and casing
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Application No.: US16757960Application Date: 2018-10-12
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Publication No.: US11408437B2Publication Date: 2022-08-09
- Inventor: Manabu Nonaka , Toshiki Yamaguchi
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JPJP2017-208648 20171027
- International Application: PCT/JP2018/038214 WO 20181012
- International Announcement: WO2019/082706 WO 20190502
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/38 ; F04D29/54

Abstract:
A vacuum pump includes a rotor that has a rotor central portion and a plurality of stages of rotor blade portions extending from the rotor central portion and having a predetermined elevation angle, and a casing that houses the rotor therein. The rotor further includes a rotor fin. The rotor fin includes a fin shaft portion connected to an end of the rotor central portion, and a transfer blade that extends from the fin shaft portion and causes particles to bounce back in a direction toward an outer periphery of the rotor, the particles falling onto the abovementioned end through an inlet port. The height of the transfer blade and the number of transfer blades are set based on the fall velocity of the particles and the rotation speed of the rotor, such that the particles are prevented from falling onto the abovementioned end without colliding with the transfer blade.
Public/Granted literature
- US20200340492A1 VACUUM PUMP, ROTOR, ROTOR FIN, AND CASING Public/Granted day:2020-10-29
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