Invention Grant
- Patent Title: Observation method and observation apparatus
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Application No.: US17273205Application Date: 2019-09-05
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Publication No.: US11408726B2Publication Date: 2022-08-09
- Inventor: Shota Toyokura
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio Cory Hargreaves and Savitch LLP
- Priority: JPJP2018-175163 20180919
- International Application: PCT/JP2019/035001 WO 20190905
- International Announcement: WO2020/059524 WO 20200326
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B9/02091

Abstract:
In an observation method, measurement values of an object of measurement at a plurality of different positions in a plane that intersects a depth direction are acquired from an optical coherence tomography instrument (S100). In the observation method, the measurement values at a same depth position at each of the plurality of positions are averaged (S104). In the observation method, the average values at each of the depth positions are integrated in the depth direction (S105). In the observation method, a shrinkage parameter of the object of measurement is calculated on the basis of the integrated value (S106).
Public/Granted literature
- US20210325170A1 OBSERVATION METHOD AND OBSERVATION APPARATUS Public/Granted day:2021-10-21
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