Invention Grant
- Patent Title: Process for producing an infrared detector and associated infrared detector
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Application No.: US17279966Application Date: 2019-11-26
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Publication No.: US11408772B2Publication Date: 2022-08-09
- Inventor: Sébastien Cortial
- Applicant: LYNRED
- Applicant Address: FR Palaiseau
- Assignee: LYNRED
- Current Assignee: LYNRED
- Current Assignee Address: FR Palaiseau
- Agency: Marshall, Gerstein & Borun LLP
- Priority: FR1872587 20181210
- International Application: PCT/EP2019/082603 WO 20191126
- International Announcement: WO2020/120129 WO 20200618
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01J5/22

Abstract:
A method of manufacturing an infrared detector includes the steps of: hybrid bonding of a detection chip to a second chip; said hybrid bonding step being carried out by adhesion of contacts and of insulator layers of the two chips; removal of a substrate of said detection chip to reach a deep oxide layer; forming of conductive pads through said deep oxide layer to reach transistors present in a semiconductor layer; and forming of microbolometers suspended over said deep oxide layer and electrically connected to the conductive pads.
Public/Granted literature
- US20210389186A1 Process for Producing an Infrared Detector and Associated Infrared Detector Public/Granted day:2021-12-16
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