• Patent Title: Process for producing an infrared detector and associated infrared detector
  • Application No.: US17279966
    Application Date: 2019-11-26
  • Publication No.: US11408772B2
    Publication Date: 2022-08-09
  • Inventor: Sébastien Cortial
  • Applicant: LYNRED
  • Applicant Address: FR Palaiseau
  • Assignee: LYNRED
  • Current Assignee: LYNRED
  • Current Assignee Address: FR Palaiseau
  • Agency: Marshall, Gerstein & Borun LLP
  • Priority: FR1872587 20181210
  • International Application: PCT/EP2019/082603 WO 20191126
  • International Announcement: WO2020/120129 WO 20200618
  • Main IPC: G01J5/02
  • IPC: G01J5/02 G01J5/22
Process for producing an infrared detector and associated infrared detector
Abstract:
A method of manufacturing an infrared detector includes the steps of: hybrid bonding of a detection chip to a second chip; said hybrid bonding step being carried out by adhesion of contacts and of insulator layers of the two chips; removal of a substrate of said detection chip to reach a deep oxide layer; forming of conductive pads through said deep oxide layer to reach transistors present in a semiconductor layer; and forming of microbolometers suspended over said deep oxide layer and electrically connected to the conductive pads.
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