Invention Grant
- Patent Title: Device and method for measuring thickness of dielectric layer in circuit board
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Application No.: US17209954Application Date: 2021-03-23
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Publication No.: US11408799B2Publication Date: 2022-08-09
- Inventor: Cheng-Jui Chang , Hung-Lin Chang
- Applicant: Unimicron Technology Corporation
- Applicant Address: TW Taoyuan
- Assignee: Unimicron Technology Corporation
- Current Assignee: Unimicron Technology Corporation
- Current Assignee Address: TW Taoyuan
- Agency: Mayer & Williams PC
- Agent Karin L. Williams; Alan D. Kamrath
- Priority: TW110101472 20210114
- Main IPC: G01M11/02
- IPC: G01M11/02 ; G01B11/06

Abstract:
A method for measuring a thickness of a dielectric layer in a circuit board is provided. The method for measuring the thickness of the dielectric layer includes the following steps. First, a circuit board including at least one dielectric layer and at least two circuit layers is provided. The dielectric layer is between the circuit layers, and the circuit board further includes a test area including a test pattern and a through hole. The test pattern includes at least two metal layers. Next, a measuring device including a main body, at least one light source and a lens module is provided. When the main body is moved into the through hole, the light source emits light to the dielectric layer and the metal layer, and the lens module shoots the dielectric layer and the metal layer to form a captured image. The thickness of the dielectric layer is obtained via the captured image.
Public/Granted literature
- US20220221370A1 DEVICE AND METHOD FOR MEASURING THICKNESS OF DIELECTRIC LAYER IN CIRCUIT BOARD Public/Granted day:2022-07-14
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