Invention Grant
- Patent Title: Aberration estimating method, aberration estimating apparatus, and storage medium
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Application No.: US16593100Application Date: 2019-10-04
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Publication No.: US11408800B2Publication Date: 2022-08-09
- Inventor: Akira Eguchi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2018-192555 20181011
- Main IPC: G01M11/02
- IPC: G01M11/02
Abstract:
An aberration estimating method includes acquiring a light intensity distribution of an optical image of an object formed via a target optical system, acquiring an approximated aberration of the target optical system based on the light intensity distribution, determining an initial value of the aberration of the target optical system based on the approximated aberration, and estimating an aberration of the target optical system using the initial value.
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