Invention Grant
- Patent Title: MEMS probe and test device using the same
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Application No.: US16108214Application Date: 2018-08-22
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Publication No.: US11408914B2Publication Date: 2022-08-09
- Inventor: Ung-gi Park
- Applicant: LEENO INDUSTRIAL INC.
- Applicant Address: KR Busan
- Assignee: LEENO INDUSTRIAL INC.
- Current Assignee: LEENO INDUSTRIAL INC.
- Current Assignee Address: KR Busan
- Agency: Park & Associates IP Law, P.C.
- Priority: KR10-2017-0106770 20170823
- Main IPC: G01R1/067
- IPC: G01R1/067 ; H01R13/03 ; H01R13/24 ; G01R1/073 ; H01R43/16 ; G01R31/28

Abstract:
A microelectromechanical system (MEMS) probe for electric connection between a tested contact point of an object to be tested and a testing contact point of a test circuit. The MEMS probe includes: a first terminal contact portion; a second terminal contact portion movable close to and away from the first terminal contact portion; and an elastic connecting portion connecting the first terminal contact portion and the second terminal contact portion, elastically deformed by an approach of the second terminal contact portion and comprising a plurality of plating layers stacked in the elastic deformation direction. According to the present disclosure, the MEMS probe includes a plurality of plating layers stacked in the elastic deformation direction, thereby decreasing fatigue failure and improving durability.
Public/Granted literature
- US20190064215A1 MEMS PROBE AND TEST DEVICE USING THE SAME Public/Granted day:2019-02-28
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