Invention Grant
- Patent Title: Electrical connecting device, inspection apparatus, and method for electrical connection between contact target and contact member
-
Application No.: US17004935Application Date: 2020-08-27
-
Publication No.: US11408926B2Publication Date: 2022-08-09
- Inventor: Jun Mochizuki
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Fenwick & West LLP
- Priority: JPJP2019-160439 20190903
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/28 ; G01R1/04 ; G01R1/067 ; G01R1/073

Abstract:
An electrical connecting device having one or more contact members to be in contact with a contact target is provided. The electrical connecting device includes a main body having one or more recesses on a surface thereof opposed to the contact target, and a flexible portion that covers the recesses to form sealed spaces. The main body includes a gas exhaust passage and an air supply passage provided for each of the sealed spaces to adjust a pressure in each of the sealed spaces, and the contact members are respectively disposed to be opposed to the recesses with the flexible portion interposed therebetween.
Public/Granted literature
Information query