Invention Grant
- Patent Title: MEMS element and optical apparatus using the same
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Application No.: US16493249Application Date: 2018-03-08
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Publication No.: US11409049B2Publication Date: 2022-08-09
- Inventor: Naoki Okimoto , Mario Kiuchi , Ryohei Uchino
- Applicant: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Applicant Address: JP Hyogo
- Assignee: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Current Assignee: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Current Assignee Address: JP Hyogo
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JPJP2017-052014 20170317
- International Application: PCT/JP2018/009084 WO 20180308
- International Announcement: WO2018/168660 WO 20180920
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B6/35 ; B81B3/00 ; G02B26/02

Abstract:
A MEMS element includes a substrate, a fixing portion provided at the substrate, first and second actuators provided at the fixing portion, a drive target member coupled to the first and second actuators, a third actuator provided at the fixing portion, and a restriction member coupled to the third actuator. The first and second actuators drive the drive target member in a direction parallel to or crossing an upper surface of the substrate. The third actuator drives the restriction member in a direction crossing a movement direction of the drive target member to position the restriction member within a movement plane of the drive target member such that the restriction member restricts displacement of the drive target member.
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