Invention Grant
- Patent Title: Optical component alignment system and method using plural fiducials
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Application No.: US17176977Application Date: 2021-02-16
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Publication No.: US11409058B1Publication Date: 2022-08-09
- Inventor: Michael Everett Fangman , Thomas Robert Daugherty , Hendrikus Johannes Jacobus Thoonen
- Applicant: MACOM Technology Solutions Holdings, Inc.
- Applicant Address: US MA Lowell
- Assignee: MACOM Technology Solutions Holdings, Inc.
- Current Assignee: MACOM Technology Solutions Holdings, Inc.
- Current Assignee Address: US MA Lowell
- Agency: Faegre Drinker Biddle & Reath LLP
- Main IPC: G02B6/42
- IPC: G02B6/42 ; G02B6/122
Abstract:
Systems and methods are provided to align a first optical component carried by a first semiconductor chip with a second optical component carried by a second semiconductor chip. Each of the first semiconductor chip and the second semiconductor chip may include at least one primary semiconductor chip fiducial which assists in the alignment of the first optical component carried by a first semiconductor chip with a second optical component carried by a second semiconductor chip.
Public/Granted literature
- US20220260793A1 OPTICAL COMPONENT ALIGNMENT SYSTEM AND METHOD USING PLURAL FIDUCIALS Public/Granted day:2022-08-18
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