Invention Grant
- Patent Title: Pattern drawing device
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Application No.: US16856474Application Date: 2020-04-23
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Publication No.: US11409199B2Publication Date: 2022-08-09
- Inventor: Masaki Kato , Shuichi Nakayama
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2017-205844 20171025,JPJP2017-227352 20171128
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/12

Abstract:
A pattern drawing device is provided with: a first cylindrical lens on which a beam from a light source device is incident and which has an anisotropic refractive power for converging, in a sub-scanning direction orthogonal to a main scanning direction, the beam traveling toward a reflection surface of a polygon mirror; an fθ lens system for causing the beam having been deflected by the reflection surface of the polygon mirror to be incident thereon, and for condensing the beam as a spot light on a surface of an object to be irradiated; and a second cylindrical lens having an anisotropic refractive power for converging, in the sub-scanning direction, the beam traveling toward the surface after being emitted from the fθ lens system.
Public/Granted literature
- US20200341379A1 PATTERN DRAWING DEVICE Public/Granted day:2020-10-29
Information query
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