Invention Grant
- Patent Title: RF measurement system and method
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Application No.: US16913548Application Date: 2020-06-26
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Publication No.: US11410832B2Publication Date: 2022-08-09
- Inventor: Merritt Funk , Yohei Yamazawa , Chelsea Dubose , Barton Lane
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/244

Abstract:
In accordance with an embodiment, a measurement system includes a sensor circuit configured to provide a voltage sense signal proportional to an electric field sensed by the RF sensor and a current sense signal proportional to a magnetic field sensed by the RF sensor; an analysis circuit comprising a frequency selective demodulator circuit configured to: demodulate the voltage sense signal into a first set of analog demodulated signals according to a set of demodulation frequencies, demodulate the current sense signal into a second set of analog demodulated signals according to the set of demodulation frequencies, and determine a phase shift between the voltage sense signal and the current sense signal for at least one frequency of the set of demodulation frequencies; and analog-to-digital converters configured to receive the first and second sets of analog demodulated signals.
Public/Granted literature
- US20210407771A1 RF Measurement System and Method Public/Granted day:2021-12-30
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