Invention Grant

  • Patent Title: Bonding apparatus
  • Application No.: US16622296
    Application Date: 2018-02-01
  • Publication No.: US11410960B2
    Publication Date: 2022-08-09
  • Inventor: Kohei SeyamaTetsuya Utano
  • Applicant: SHINKAWA LTD.
  • Applicant Address: JP Tokyo
  • Assignee: SHINKAWA LTD.
  • Current Assignee: SHINKAWA LTD.
  • Current Assignee Address: JP Tokyo
  • Agency: JCIPRNET
  • Priority: JPJP2017-018863 20170203
  • International Application: PCT/JP2018/003386 WO 20180201
  • International Announcement: WO2018/143330 WO 20180809
  • Main IPC: H01L23/00
  • IPC: H01L23/00 H01L21/683
Bonding apparatus
Abstract:
A bonding apparatus includes a bonding stage on which either a rectangular substrate or a circular substrate can be installed; a first transport mechanism which transports the rectangular substrate from a first carry-in unit to the bonding stage and from the bonding stage to a first carry-out unit; and a second transport mechanism which transports the circular substrate from a second carry-in/out unit to the bonding stage and from the bonding stage to the second carry-in/out unit, in which a first transport path determined by the first transport mechanism and a second transport path determined by the second transport mechanism partially overlap.
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