Invention Grant
- Patent Title: Bonding apparatus
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Application No.: US16622296Application Date: 2018-02-01
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Publication No.: US11410960B2Publication Date: 2022-08-09
- Inventor: Kohei Seyama , Tetsuya Utano
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JPJP2017-018863 20170203
- International Application: PCT/JP2018/003386 WO 20180201
- International Announcement: WO2018/143330 WO 20180809
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/683

Abstract:
A bonding apparatus includes a bonding stage on which either a rectangular substrate or a circular substrate can be installed; a first transport mechanism which transports the rectangular substrate from a first carry-in unit to the bonding stage and from the bonding stage to a first carry-out unit; and a second transport mechanism which transports the circular substrate from a second carry-in/out unit to the bonding stage and from the bonding stage to the second carry-in/out unit, in which a first transport path determined by the first transport mechanism and a second transport path determined by the second transport mechanism partially overlap.
Public/Granted literature
- US20200286850A1 BONDING DEVICE Public/Granted day:2020-09-10
Information query
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