Invention Grant
- Patent Title: Process for fabrication of an optoelectronic device comprising a plurality of diodes
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Application No.: US16762090Application Date: 2018-11-06
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Publication No.: US11410978B2Publication Date: 2022-08-09
- Inventor: Hubert Bono , Julia Simon
- Applicant: Commissariat à I'Énergie Atomique et aux Énergies Alternatives , Thales
- Applicant Address: FR Paris; FR Courbevoie
- Assignee: Commissariat à I'Énergie Atomique et aux Énergies Alternatives,Thales
- Current Assignee: Commissariat à I'Énergie Atomique et aux Énergies Alternatives,Thales
- Current Assignee Address: FR Paris; FR Courbevoie
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR1760578 20171110
- International Application: PCT/FR2018/052742 WO 20181106
- International Announcement: WO2019/092357 WO 20190516
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L25/16 ; H01L33/00 ; H01L33/44 ; H01L33/62 ; H01L27/15

Abstract:
A method of manufacturing an optoelectronic device, including: a) transferring, onto a surface of a control circuit, a diode stack including first and second semiconductor layers of opposite conductivity types, so that the second layer is electrically connected to metal pads of the control circuit; b) forming in the active stack trenches delimiting a plurality of diodes connected to separate metal pads of the control circuit; c) depositing an insulating layer on the lateral walls of the trenches; d) partially removing the insulating layer to expose the sides of the portions of the first layer delimited by the trenches; and e) forming a metallization coating the lateral walls and the bottom of the trenches and contacting the sides of the portions of the first layer delimited by the trenches.
Public/Granted literature
- US20200335484A1 PROCESS FOR FABRICATION OF AN OPTOELECTRONIC DEVICE COMPRISING A PLURALITY OF DIODES Public/Granted day:2020-10-22
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