Invention Grant
- Patent Title: Vertical memory structure with air gaps and method for preparing the same
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Application No.: US16848359Application Date: 2020-04-14
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Publication No.: US11411019B2Publication Date: 2022-08-09
- Inventor: Yuan-Yuan Lin
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11582 ; H01L23/532 ; H01L21/768 ; H01L21/02 ; H01L21/311 ; H01L23/522

Abstract:
The present disclosure provides a vertical memory structure with air gaps and a method for preparing the vertical memory structure. The vertical memory structure includes a semiconductor stack including a lower semiconductor pattern structure filling a recess on a substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate; a plurality of gate electrodes surrounding a sidewall of the semiconductor stack, the plurality of gate electrodes being at a plurality of levels, respectively, so as to be spaced apart from each other in the first direction; and a plurality of air gap structures disposed at outer sides of the plurality of gate electrodes respectively.
Public/Granted literature
- US20210320117A1 VERTICAL MEMORY STRUCTURE WITH AIR GAPS AND METHOD FOR PREPARING THE SAME Public/Granted day:2021-10-14
Information query
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