LOCOS with sidewall spacer for different capacitance density capacitors
Abstract:
An integrated circuit (IC) includes a first capacitor, a second capacitor, and functional circuitry configured together with the capacitors for realizing at least one circuit function in a semiconductor surface layer on a substrate. The capacitors include a top plate over a LOCal Oxidation of Silicon (LOCOS) oxide, wherein a thickness of the LOCOS oxide for the second capacitor is thicker than a thickness of the LOCOS oxide for the first capacitor. There is a contact for the top plate and a contact for a bottom plate for the first and second capacitors.
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