Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
-
Application No.: US17111466Application Date: 2020-12-03
-
Publication No.: US11411089B2Publication Date: 2022-08-09
- Inventor: Georgios Vellianitis
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/40 ; H01L29/423 ; H01L29/78 ; H01L29/08 ; H01L29/10

Abstract:
A semiconductor device and a manufacturing method thereof are provided. The gate structure and the source and drain terminals are located in the insulating dielectric layer, and the source and drain terminals are located respectively at both opposite ends of the gate structure. The channel region is sandwiched between the gate structure and the source and drain terminals and surrounds the gate structure. The channel region extends between the source and drain terminals.
Public/Granted literature
- US20210391430A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-12-16
Information query
IPC分类: