Invention Grant
- Patent Title: Integrated assemblies
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Application No.: US17017426Application Date: 2020-09-10
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Publication No.: US11411118B2Publication Date: 2022-08-09
- Inventor: Srinivas Pulugurtha , Litao Yang , Haitao Liu , Kamal M. Karda
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/11514 ; H01L29/49 ; H01L27/108 ; H01L29/51

Abstract:
Some embodiments include integrated memory. The integrated memory includes a first series of first conductive structures and a second series of conductive structures. The first conductive structures extend along a first direction. The second conductive structures extend along a second direction which crosses the first direction. Pillars of semiconductor material extend upwardly from the first conductive structures. Each of the pillars includes a lower source/drain region, an upper source/drain region, and a channel region between the lower and upper source/drain regions. The lower source/drain regions are coupled with the first conductive structures. Insulative material is adjacent sidewall surfaces of the pillars. The insulative material includes ZrOx, where x is a number greater than 0. The second conductive structures include gating regions which are spaced from the channel regions by at least the insulative material. Storage elements are coupled with the upper source/drain regions.
Public/Granted literature
- US20220077320A1 Integrated Assemblies Public/Granted day:2022-03-10
Information query
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