Invention Grant
- Patent Title: Microelectronic structure with viscous damping controlled by controlling a thermo-piezoresistive effect
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Application No.: US16471378Application Date: 2017-12-22
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Publication No.: US11414318B2Publication Date: 2022-08-16
- Inventor: Guillaume Jourdan , Guillaume Lehee
- Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES , SAFRAN ELECTRONICS & DEFENSE
- Applicant Address: FR Paris; FR Boulogne Billancourt
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES,SAFRAN ELECTRONICS & DEFENSE
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES,SAFRAN ELECTRONICS & DEFENSE
- Current Assignee Address: FR Paris; FR Boulogne Billancourt
- Agency: Pearne & Gordon LLP
- Priority: FR1663255 20161222
- International Application: PCT/FR2017/053812 WO 20171222
- International Announcement: WO2018/115786 WO 20180628
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/02 ; G01L1/18 ; G01P1/00

Abstract:
Microelectronic structure comprising at least one movable mass that is mechanically connected to a first mechanical element by a first mechanically linking connector and to a second mechanical element (24) by electrically conductive second mechanically linking connector, and a device for electrically biasing the second mechanically linking connector, the second mechanically linking connector being such that they are the seat of a thermo-piezoresistive effect, the second linking connector and the movable mass being placed with respect to each other so that a movement of the movable mass applies a mechanical stress to the second linking connector, wherein the electrically biasing device are DC voltage biasing device and form, with at least the second mechanically linking connector, a thermo-piezoresistive feedback electric circuit.
Public/Granted literature
- US20190330050A1 MICROELECTRONIC STRUCTURE WITH VISCOUS DAMPING CONTROLLED BY CONTROLLING A THERMO-PIEZORESISTIVE EFFECT Public/Granted day:2019-10-31
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