Invention Grant
- Patent Title: Method to operate an apparatus for feeding liquid metal to an evaporator device
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Application No.: US16098461Application Date: 2017-05-01
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Publication No.: US11414744B2Publication Date: 2022-08-16
- Inventor: Edzo Zoestbergen , Colin Commandeur , Roland Jan Snijders , Eduard Paul Mattheus Bakker , Peter William Hazelett , Douglas Alexander Hamilton , Stephen James Widdis , Timothy Dean Kaiser
- Applicant: TATA STEEL NEDERLAND TECHNOLOGY B.V.
- Applicant Address: NL Velsen-Noord
- Assignee: TATA STEEL NEDERLAND TECHNOLOGY B.V.
- Current Assignee: TATA STEEL NEDERLAND TECHNOLOGY B.V.
- Current Assignee Address: NL Velsen-Noord
- Agency: Vorys, Sater, Seymour and Pease LLP
- Priority: EP16168162 20160503
- International Application: PCT/EP2017/060317 WO 20170501
- International Announcement: WO2017/191083 WO 20171109
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/14 ; H02K44/02 ; H02K44/04 ; C23C14/16 ; C23C14/56
Abstract:
A method to operate an apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the feed tube runs from a container adapted to contain a liquid metal to the evaporator device and wherein an electromagnetic pump is provided in the feed tube and a valve in the feed tube between the electromagnetic pump and the evaporator device. An at least partially gas permeable electromagnetic pump, which is enclosed in a pressure controlled enclosure, is used in the method wherein electromagnetic pump and the pressure controlled enclosure are controlled such that filling and draining of the evaporator device and feed tube can be done without affecting the vacuum pressure in the vacuum chamber.
Public/Granted literature
- US20190264320A1 METHOD TO OPERATE AN APPARATUS FOR FEEDING LIQUID METAL TO AN EVAPORATOR DEVICE Public/Granted day:2019-08-29
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