Invention Grant
- Patent Title: Sputtering target-backing plate assembly and production method thereof
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Application No.: US15937940Application Date: 2018-03-28
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Publication No.: US11414745B2Publication Date: 2022-08-16
- Inventor: Hiroshi Takamura , Ryosuke Sakashita
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JPJP2017-072304 20170331
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; B23K35/26 ; B23K20/10

Abstract:
A sputtering target-backing plate assembly in which a Si sputtering target is bonded to a backing plate by way of a brazing material, wherein the brazing material has a melting point of 200° C. or higher and a bonding strength of 0.16 kgf/cm2 or higher. An object is to provide a sputtering target-backing plate assembly in which a Si sputtering target is bonded to a backing plate by way of a brazing material, wherein the sputtering target-backing plate assembly has a high bonding strength and is free from separation even under high temperature sputtering conditions such as during high power sputtering.
Public/Granted literature
- US20180282859A1 SPUTTERING TARGET-BACKING PLATE ASSEMBLY AND PRODUCTION METHOD THEREOF Public/Granted day:2018-10-04
Information query
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