Invention Grant
- Patent Title: Film forming apparatus and film forming method using the same
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Application No.: US16453730Application Date: 2019-06-26
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Publication No.: US11414746B2Publication Date: 2022-08-16
- Inventor: Kazuya Demura , Takamasa Horie , Hiroyuki Kobayashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JPJP2018-126321 20180702
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/54 ; H01J37/34 ; C23C14/50
Abstract:
A film forming apparatus includes a base material support mechanism configured to rotate a base material supported by the base material support mechanism about a first axis, and a first cathode portion on which a target in a cylindrical shape containing a film forming material is mounted and configured to rotate the target about a second axis, in a chamber. The second axis is disposed at a position skewed with respect to the first axis.
Public/Granted literature
- US20200002806A1 FILM FORMING APPARATUS AND FILM FORMING METHOD USING THE SAME Public/Granted day:2020-01-02
Information query
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