Invention Grant
- Patent Title: Vacuum pump, and control device of vacuum pump
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Application No.: US16967889Application Date: 2019-02-08
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Publication No.: US11415151B2Publication Date: 2022-08-16
- Inventor: Yanbin Sun
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JPJP2018-025853 20180216
- International Application: PCT/JP2019/004744 WO 20190208
- International Announcement: WO2019/159854 WO 20190822
- Main IPC: H05K7/20
- IPC: H05K7/20 ; F04D29/58 ; F28D9/00 ; F04D19/04

Abstract:
To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump includes a pump main body and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket which has an inner surface and an outer surface in a vertical portion and in which a cooling medium flow passage is formed, and a plurality of electrical equipment that have circuit components and can be cooled by the cooling jacket. The inner surface and the outer surface are formed facing different directions, and the electrical equipment portions are attached respectively to the inner surface and the outer surface so that heat can be transferred.
Public/Granted literature
- US20210025406A1 VACUUM PUMP, AND CONTROL DEVICE OF VACUUM PUMP Public/Granted day:2021-01-28
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