Invention Grant
- Patent Title: Out-of-plane sensing gyroscope robust to external acceleration and rotation
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Application No.: US16663629Application Date: 2019-10-25
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Publication No.: US11415418B2Publication Date: 2022-08-16
- Inventor: Jaakko Ruohio , Luca Coronato , Giacomo Gafforelli
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Joshua Van Hoven
- Main IPC: G01C19/5747
- IPC: G01C19/5747

Abstract:
A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.
Public/Granted literature
- US20200096338A1 OUT-OF-PLANE SENSING GYROSCOPE ROBUST TO EXTERNAL ACCELERATION AND ROTATION Public/Granted day:2020-03-26
Information query
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