Invention Grant
- Patent Title: Physical quantity measurement device and method for manufacturing physical quantity measurement device
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Application No.: US17191210Application Date: 2021-03-03
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Publication No.: US11415445B2Publication Date: 2022-08-16
- Inventor: Yasushi Kono
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Nixon & Vanderhye P.C.
- Priority: JPJP2018-167181 20180906
- Main IPC: G01F1/684
- IPC: G01F1/684 ; G01F1/692 ; G01F1/696 ; G01F5/00 ; F02M35/10

Abstract:
A physical quantity measurement device includes a physical quantity detector and a support plate part superposed on a back surface of the physical quantity detector to support the physical quantity detector. The physical quantity detector includes a recessed part on the back surface, and a membrane part defining a bottom surface of the recessed part and being provided with a detection element for detecting a physical quantity of a fluid in a measurement low path. An area of the support plate part covering the recessed part includes a communication hole communicating with the recessed part. A peripheral edge portion of a hole opening, which is an end of the communication hole adjacent to the recessed part, is spaced apart, toward the inside, from a peripheral edge portion of a recess opening, which is an end of the recessed part adjacent to the support plate part.
Public/Granted literature
- US20210190561A1 PHYSICAL QUANTITY MEASUREMENT DEVICE AND METHOD FOR MANUFACTURING PHYSICAL QUANTITY MEASUREMENT DEVICE Public/Granted day:2021-06-24
Information query