Invention Grant
- Patent Title: Multi-controller inspection system
-
Application No.: US17136919Application Date: 2020-12-29
-
Publication No.: US11415526B2Publication Date: 2022-08-16
- Inventor: Brian Duffy , Mark Roulo , Ashok Mathew , Jing Zhang , Kris Bhaskar
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01N21/88

Abstract:
An inspection system is disclosed. The inspection system includes a shared memory configured to receive image data from a defect inspection tool and a controller communicatively coupled to the shared memory. The controller includes a host image module configured to apply one or more general-purpose defect-inspection algorithms to the image data using central-processing unit (CPU) architectures, a results module configured to generate inspection data for defects identified by the host image module, and secondary image module(s) configured to apply one or more targeted defect-inspection algorithms to the image data. The secondary image module(s) employ flexible sampling of the image data to match a data processing rate of the host image module within a selected tolerance. The flexible sampling of the image data is adjusted responsive to the inspection data generated by the results module and the host image module.
Public/Granted literature
- US20210349038A1 MULTI-CONTROLLER INSPECTION SYSTEM Public/Granted day:2021-11-11
Information query