Invention Grant
- Patent Title: Gas sensor module and method of manufacturing gas sensor module
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Application No.: US16472134Application Date: 2017-11-06
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Publication No.: US11415536B2Publication Date: 2022-08-16
- Inventor: Teppei Kimura , Hiroaki Suzuki
- Applicant: Nissha Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Nissha Co., Ltd.
- Current Assignee: Nissha Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Thorpe North & Western
- Priority: JPJP2016-246958 20161220
- International Application: PCT/JP2017/039870 WO 20171106
- International Announcement: WO2018/116663 WO 20180628
- Main IPC: G01N27/12
- IPC: G01N27/12 ; H01L21/48 ; H01L21/52 ; H01L21/683 ; H01L21/784 ; H01L23/055 ; H01L23/00

Abstract:
A package is configured such that a length in a direction parallel to a semiconductor chip is larger than a length in a direction orthogonal to the semiconductor chip, and the package includes a substrate to which the semiconductor chip is electrically connected and fixed, a side wall firmly attached to the substrate, and a cover firmly attached to the side wall. The package includes a detection space in which gas flows around the semiconductor chip. The package includes openings formed in the side wall and/or between the side wall and the cover and communicated with the detection space.
Public/Granted literature
- US20190383761A1 Gas Sensor Module and Method of Manufacturing Gas Sensor Module Public/Granted day:2019-12-19
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