Invention Grant
- Patent Title: Optical inspection circuit
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Application No.: US17057057Application Date: 2019-05-14
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Publication No.: US11415752B2Publication Date: 2022-08-16
- Inventor: Hiroshi Fukuda , Toru Miura , Yoshiho Maeda
- Applicant: Nippon Telegraph and Telephone Corporation
- Applicant Address: JP Tokyo
- Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- Priority: JPJP2018-102097 20180529
- International Application: PCT/JP2019/019129 WO 20190514
- International Announcement: WO2019/230372 WO 20191205
- Main IPC: G02B6/34
- IPC: G02B6/34 ; G02B6/12 ; G02B6/124 ; G02B6/42 ; H01L31/0232 ; H01L31/10

Abstract:
An optical inspection circuit includes an optical circuit to be inspected formed on a substrate, an input optical waveguide optically connected to the optical circuit, and an output optical waveguide optically connected to the optical circuit. The input optical waveguide is connected with a grating coupler for input. The grating coupler is connected with the input optical waveguide via a spot size conversion unit. The output optical waveguide is optically connected with a photodiode.
Public/Granted literature
- US20210181426A1 Optical Inspection Circuit Public/Granted day:2021-06-17
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