Invention Grant
- Patent Title: Optical bench, method of making and method of using
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Application No.: US17116806Application Date: 2020-12-09
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Publication No.: US11415762B2Publication Date: 2022-08-16
- Inventor: Ying-Hao Kuo , Shang-Yun Hou , Wan-Yu Lee
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G02B6/42
- IPC: G02B6/42 ; H01S5/0237 ; H01S5/02326 ; G02B6/12 ; G02B6/122 ; H01L25/16 ; H01S5/00 ; G02B6/136 ; H01S5/183 ; H01S5/30

Abstract:
A method of forming an optical bench includes forming a reflector layer over a sloping side of a substrate. The method includes depositing a redistribution layer over the substrate. The method includes disposing an under bump metallization (UBM) layer over the redistribution layer. The method includes forming a passivation layer over the redistribution layer and surrounding sidewalls of the UBM layer. The method includes mounting a first optical component over an uppermost portion of the substrate, wherein the reflector layer is configured to reflect an electromagnetic wave from the first optical component, and the first optical component is mounted outside the trench.
Public/Granted literature
- US20210088737A1 OPTICAL BENCH, METHOD OF MAKING AND METHOD OF USING Public/Granted day:2021-03-25
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